Publications

@article{Bal.05,
author = {S.V. Babin and A.B. Kahng and I.I. Mandoiu and S. Muddu}, title = {Improving CD accuracy and throughput by subfield scheduling in electron beam mask writing}, journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures}, year = {2005}, volume = {23}, number = {6}, pages = {3094-3100}, url = {http://dx.doi.org/10.1116/1.2132330}, keywords = {lab}, confidential = {n} }