@article{Bal.05,
    author = {S.V. Babin and A.B. Kahng and I.I. Mandoiu and S. Muddu},
    title = {Improving CD accuracy and throughput by subfield scheduling in electron beam mask writing},
    journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures},
    year = {2005},
    volume = {23},
    number = {6},
    pages = {3094-3100},
    url = {http://dx.doi.org/10.1116/1.2132330},
    keywords = {lab},
    confidential = {n}
}